In semiconductor fabrication, a resist is a thin layer used to transfer a circuit pattern to the semiconductor substrate which it is deposited upon. A resist can be patterned via lithography to form a (sub)micrometer-scale, temporary mask that protects selected areas of the underlying substrate during subsequent processing steps. The material used to prepare said thin layer is typically a viscous solution. Resists are generally proprietary mixtures of a polymer or its precursor and other small molecules (e.g. photoacid generators) that have been specially formulated for a given lithography technology. Resists used during photolithography are called photoresists.
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Famous quotes containing the word resist:
“I know as well as any one, [the devil] is an adversary, whom if we resist, he will fly from us—but I seldom resist him at all; from a terror, that though I may conquer, I may still get a hurt in the combat—so ... instead of thinking to make him fly, I generally fly myself.”
—Laurence Sterne (1713–1768)
“[A]s I am pretty well acquainted by great Opportunities with the Nature of Man, and know of a Truth, that all Men fight against their Will, the Danger vanishes, and Resolution rises upon this Subject. For this Reason I shall talk very freely on a Custom which all Men wish exploded, tho’ no Man has Courage enough to resist it.”
—Richard Steele (1672–1729)
“Those who write for lucre or fame are grosser Iscariots than the cartel robbers, for they steal the genius of the people, which is its will to resist evil.”
—Edward Dahlberg (1900–1977)