XPS may refer to:
- X-ray photoelectron spectroscopy XPS, also known as ESCA
- Exopolysaccharide, or extracellular polymeric substance, a sliming substance secreted by bacteria and responsible for cells adhesion onto surfaces and in biofilms
- Open XML Paper Specification (XPS or OpenXPS), an open royalty-free fixed-layout document format developed by Microsoft
- The Dell XPS desktop and notebook lines
- Extruded polystyrene
- Hybrid Positioning System
- Xilinx Platform Studio, part of the Embedded Development Kit for Xilinx FPGAs containing embedded processor blocks
- Xpress Professional Services, a subsidiary of the Illinois Manufacturers' Association