Advantages of Scanning Probe Microscopy
- The resolution of the microscopes is not limited by diffraction, but only by the size of the probe-sample interaction volume (i.e., point spread function), which can be as small as a few picometres. Hence the ability to measure small local differences in object height (like that of 135 picometre steps on <100> silicon) is unparalleled. Laterally the probe-sample interaction extends only across the tip atom or atoms involved in the interaction.
- The interaction can be used to modify the sample to create small structures (nanolithography).
- Unlike electron microscope methods, specimens do not require a partial vacuum but can be observed in air at standard temperature and pressure or while submerged in a liquid reaction vessel.
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