Materials For MEMS Manufacturing
The fabrication of MEMS evolved from the process technology in semiconductor device fabrication, i.e. the basic techniques are deposition of material layers, patterning by photolithography and etching to produce the required shapes.
Read more about this topic: Microelectromechanical Systems
Famous quotes containing the word materials:
“Young children learn in a different manner from that of older children and adults, yet we can teach them many things if we adapt our materials and mode of instruction to their level of ability. But we miseducate young children when we assume that their learning abilities are comparable to those of older children and that they can be taught with materials and with the same instructional procedures appropriate to school-age children.”
—David Elkind (20th century)