History of MOEMS
During 1991-1993, Dr. M. Edward Motamedi, a former Rockwell International innovator in the areas of both Micro-Electro-Mechanical Systems (MEMS) and Micro-optics, used internally the acronym of MOEMS for Micro-Opto-Electro-Mechanical Systems. This was to distinguish between Optical MEMS and MOEMS, where Optical MEMS could include bulk optics but MOEMS is truly based on microtechnology where MOEMS devices are batched processed exactly like integrated circuits, but this is not true in most cases for Optical MEMS.
In 1993, Dr. Motamedi officially introduced MOEMS for the first time, as the powerful combination of MEMS and Micro-optics, in an invited talk at the SPIE Critical Reviews of Optical Science and Technology conference in San Diego. In this talk Dr. Motamedi introduced the figure bellow, for showing that MOEMS is the interaction of three major microtechnologies; namely Micro-optics, Micromechanics, and Microelectronics.
Read more about this topic: Micro-Opto-Electro-Mechanical Systems
Famous quotes containing the words history of and/or history:
“I feel as tall as you.”
—Ellis Meredith, U.S. suffragist. As quoted in History of Woman Suffrage, vol. 4, ch. 14, by Susan B. Anthony and Ida Husted Harper (1902)
“Throughout the history of commercial life nobody has ever quite liked the commission man. His function is too vague, his presence always seems one too many, his profit looks too easy, and even when you admit that he has a necessary function, you feel that this function is, as it were, a personification of something that in an ethical society would not need to exist. If people could deal with one another honestly, they would not need agents.”
—Raymond Chandler (1888–1959)