Micro-Opto-Electro-Mechanical Systems (MOEMS) is not a special class of Micro-Electro-Mechanical Systems (MEMS) but in fact it is MEMS merged with Micro-optics which involves sensing or manipulating optical signals on a very small size scale using integrated mechanical, optical, and electrical systems. MOEMS includes a wide variety of devices including optical switch, optical cross-connect, tunable VCSEL, microbolometers amongst others. These devices are usually fabricated using micro-optics and standard micromachining technologies using materials like silicon, silicon dioxide, silicon nitride and gallium arsenide.
Read more about Micro-Opto-Electro-Mechanical Systems: MOEMS: Merging Multi Technologies, History of MOEMS, References For Micro-mechanical Systems
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