Unexpected Resolution Limits
Given that EUV is a significant reduction in wavelength compared to current lithography wavelengths, one would expect significantly better resolution. However, the resolution is ultimately determined by the interaction volume in the image recording medium, i.e., the photoresist. As noted above, the low energy electrons released by EUV could blur the original EUV image. In addition, there are statistical effects, especially for feature areas less than 1500 square nanometers.
Read more about this topic: Extreme Ultraviolet Lithography
Famous quotes containing the words unexpected, resolution and/or limits:
“Met face to face, these Indians in their native woods looked like the sinister and slouching fellows whom you meet picking up strings and paper in the streets of a city. There is, in fact, a remarkable and unexpected resemblance between the degraded savage and the lowest classes in a great city. The one is no more a child of nature than the other. In the progress of degradation the distinction of races is soon lost.”
—Henry David Thoreau (1817–1862)
“I had crossed de line of which I had so long been dreaming. I was free; but dere was no one to welcome me to de land of freedom. I was a stranger in a strange land, and my home after all was down in de old cabin quarter, wid de ole folks, and my brudders and sisters. But to dis solemn resolution I came; I was free, and dey should be free also; I would make a home for dem in de North, and de Lord helping me, I would bring dem all dere.”
—Harriet Tubman (c. 1820–1913)
“An art whose limits depend on a moving image, mass audience, and industrial production is bound to differ from an art whose limits depend on language, a limited audience, and individual creation. In short, the filmed novel, in spite of certain resemblances, will inevitably become a different artistic entity from the novel on which it is based.”
—George Bluestone, U.S. educator, critic. “The Limits of the Novel and the Limits of the Film,” Novels Into Film, Johns Hopkins Press (1957)