Unexpected Resolution Limits
Given that EUV is a significant reduction in wavelength compared to current lithography wavelengths, one would expect significantly better resolution. However, the resolution is ultimately determined by the interaction volume in the image recording medium, i.e., the photoresist. As noted above, the low energy electrons released by EUV could blur the original EUV image. In addition, there are statistical effects, especially for feature areas less than 1500 square nanometers.
Read more about this topic: Extreme Ultraviolet Lithography
Famous quotes containing the words unexpected, resolution and/or limits:
“The fear of burglars is not only the fear of being robbed, but also the fear of a sudden and unexpected clutch out of the darkness.”
—Elias Canetti (b. 1905)
“We have been here over forty years, a longer period than the children of Israel wandered through the wilderness, coming to this Capitol pleading for this recognition of the principle that the Government derives its just powers from the consent of the governed. Mr. Chairman, we ask that you report our resolution favorably if you can but unfavorably if you must; that you report one way or the other, so that the Senate may have the chance to consider it.”
—Anna Howard Shaw (1847–1919)
“To the extent to which genius can be conjoined with a merely good human being, Haydn possessed genius. He never exceeds the limits that morality sets for the intellect; he only composes music which has “no past.””
—Friedrich Nietzsche (1844–1900)