Capabilities of Advanced Systems
- Measure uniformity of elemental composition across the top the surface (or line profiling or mapping)
- Measure uniformity of elemental composition as a function of depth by ion beam etching (or depth profiling)
- Measure uniformity of elemental composition as a function of depth by tilting the sample (or angle-resolved XPS)
Read more about this topic: X-ray Photoelectron Spectroscopy
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