A stepper is a device used in the manufacture of integrated circuits (ICs) that is similar in operation to a slide projector or a photographic enlarger. Steppers are an essential part of the complex process, called photolithography, that creates millions of microscopic circuit elements on the surface of tiny chips of silicon. These chips form the heart of ICs such as computer processors, memory chips, and many other devices.
Read more about Stepper: The Stepper's Role in Photolithography, Basic Operation, Major Subassemblies, Illumination and The Challenges of Improving Resolution, Scanners