Simultaneous Immersion Mirau Interferometer
In immersion Mirau interferometry, the interference patterns needed to reproduce the image are acquired at different times and vibrations, if they exist, prevent maintaining the desirable phase shifts between consecutive frames. Thus immersion Mirau interferometery is very sensitive to vibrations. One solution is to acquire all interference images at the same time. This is known as a simultaneous immersion Mirau interferometer.
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