Fabrication
Like most mesoscopic devices such as solid state qubits, single-electron transistors, quantum dots, etc., flux qubits are fabricated using techniques similar to those used in the micro-electronics industry. The devices are made on silicon wafers using electron beam lithography and metallic thin film evaporation processes. To create the Josephson junction a technique known as shadow evaporation is normally used; this involves evaporating the source metal alternately at two angles through the lithography defined mask in the electron beam resist. This results in two overlapping layers of the superconducting metal, in between which a thin layer of insulator (normally aluminum oxide) is deposited.
Read more about this topic: Flux Qubit
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