Czochralski Process - Production of Czochralski Silicon

Production of Czochralski Silicon

High-purity, semiconductor-grade silicon (only a few parts per million of impurities) is melted in a crucible, usually made of quartz. Dopant impurity atoms such as boron or phosphorus can be added to the molten silicon in precise amounts to dope the silicon, thus changing it into p-type or n-type silicon, with different electronic properties. A precisely oriented rod-mounted seed crystal is dipped into the molten silicon. The seed crystal's rod is slowly pulled upwards and rotated simultaneously. By precisely controlling the temperature gradients, rate of pulling and speed of rotation, it is possible to extract a large, single-crystal, cylindrical ingot from the melt. Occurrence of unwanted instabilities in the melt can be avoided by investigating and visualizing the temperature and velocity fields during the crystal growth process. This process is normally performed in an inert atmosphere, such as argon, in an inert chamber, such as quartz.

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