Theory
According to Abbe’s theory of image formation, developed in 1873, the resolving capability of an optical component is ultimately limited by the spreading out of each image point due to diffraction. Unless the aperture of the optical component is large enough to collect all the diffracted light, the finer aspects of the image will not correspond exactly to the object. The minimum resolution (d) for the optical component are thus limited by its aperture size, and expressed by the Rayleigh criterion:
Here, λ0 is the wavelength in vacuum; NA is the numerical aperture for the optical component (maximum 1.3–1.4 for modern objectives with a very high magnification factor). Thus, the resolution limit is usually around λ0/2 for conventional optical microscopy.
This treatment only assumes the light diffracted into the far-field that propagates without any restrictions. NSOM makes use of evanescent or non propagating fields that exist only near the surface of the object. These fields carry the high frequency spatial information about the object and have intensities that drop off exponentially with distance from the object. Because of this, the detector must be placed very close to the sample in the near field zone, typically a few nanometers. As a result, near field microscopy remains primarily a surface inspection technique. The detector is then rastered across the sample using a piezoelectric stage. The scanning can either be done at a constant height or with regulated height by using a feedback mechanism.
Read more about this topic: Near-field Scanning Optical Microscope
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