Nanoelectromechanical System - Approaches To Miniaturization

Approaches To Miniaturization

Two complementary approaches to fabrication of NEMS systems can be found. The top-down approach uses the traditional microfabrication methods, i.e. optical and electron beam lithography, to manufacture devices. While being limited by the resolution of these methods, it allows a large degree of control over the resulting structures. Typically, devices are fabricated from metallic thin films or etched semiconductor layers.

Bottom-up approaches, in contrast, use the chemical properties of single molecules to cause single-molecule components to (a) self-organize or self-assemble into some useful conformation, or (b) rely on positional assembly. These approaches utilize the concepts of molecular self-assembly and/or molecular recognition. This allows fabrication of much smaller structures, albeit often at the cost of limited control of the fabrication process.

A combination of these approaches may also be used, in which nanoscale molecules are integrated into a top-down framework. One such example is the carbon Nanotube nanomotor.