Membrane Sensor
An emerging technology utilizes a very thin electronic membrane placed in the air stream. The membrane has a thin film temperature sensor printed on the upstream side, and one on the downstream side. A heater is integrated in the center of the membrane which maintains a constant temperature similar to the hot-wire approach. Without any airflow, the temperature profile across the membrane is uniform. When air flows across the membrane, the upstream side cools differently from the downstream side. The difference between the upstream and downstream temperature indicates the mass airflow. The thermal membrane sensor is also capable of measuring flow in both directions, which sometimes occur in pulsating situations. Technological progress allows this kind of sensor to be manufactured on the microscopic scale as microsensors using Microelectromechanical systems technology. Such a microsensor reaches a significantly higher speed and sensitivity compared with macroscopic approaches. See also MEMS sensor generations.
Read more about this topic: Mass Flow Sensor