Laser Voltage Prober
The laser voltage probe (LVP) is a laser-based voltage and timing waveform acquisition system which is used to perform failure analysis on flip-chip integrated circuits. The device to be analyzed is de-encapsulated in order to expose the silicon surface. The silicon substrate is thinned mechanically using a back side mechanical thinning tool. The thinned device is then mounted on a movable stage and connected to an electrical stimulus source. Signal measurements are performed through the back side of the device after substrate thinning has been performed. The device being probed must be electrically stimulated using a repeating test pattern, with a trigger pulse provided to the LVP as reference. The operation of the LVP is similar to that of a sampling oscilloscope.
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