Environmental Scanning Electron Microscope - How IT Works

How It Works

An ESEM employs a scanned electron beam and electromagnetic lenses to focus and direct the beam on the specimen surface in an identical way as a conventional SEM. A very small focused electron spot (probe) is scanned in a raster form over a small specimen area. The beam electrons interact with the specimen surface layer and produce various signals (information) that are collected with appropriate detectors. The output of these detectors modulates, via appropriate electronics, the screen of a monitor to form an image that corresponds to the small raster and information, pixel by pixel, emanating from the specimen surface. Beyond these common principles, the ESEM deviates substantially from a SEM in several respects, all of which are important in the correct design and operation of the instrument. The outline below highlights these requirements and how the system works.

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