Marquis, Princes, Then Dukes of Massa and Carrara
- Antonio Malaspina (1442–1445) Marquis of Massa and Fosdinovo
- Iacopo Malaspina (1445–1481) Marquis of Massa and Lord of Carrara since 1473
- Alberico II Malaspina (1481–1519)
- Ricciarda Cybo-Malaspina (1519–1546) e (1547–1553)
- Giulio I Cybo-Malaspina (1546–1547)
- Alberico I Cybo-Malaspina (1554–1623) Marquis of Massa and Carrara from 1558, then Prince of Massa and Marquis of Carrara from 1568
- Carlo I Cybo-Malaspina (1623–1662)
- Alberico II Cybo-Malaspina (1662–1690) Duke of Massa and Prince of Carrara from 1664
- Carlo II Cybo-Malaspina (1690–1710)
- Alberico III Cybo-Malaspina (1710–1715)
- Alderamo Cybo-Malaspina (1715–1731)
- Maria Teresa Cybo-Malaspina (1731–1790)
- Maria Beatrice d'Este, Duchess of Massa (1790–1797) Duchess of Modena, Reggio, Massa and Carrara
- Annexation of the Republic and Cisalpine Cispadana following the invasion of Napoleon (1796–1806)
- Elisa Bonaparte Baciocchi (1806–1814)
- Maria Beatrice d'Este, Duchess of Massa (1815–1829)
- The duchy is annexed to the Duchy of Modena
- Francesco IV d'Este (1829–1846)
- Francesco V d'Este (1846–1859)
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