Materials For MEMS Manufacturing
The fabrication of MEMS evolved from the process technology in semiconductor device fabrication, i.e. the basic techniques are deposition of material layers, patterning by photolithography and etching to produce the required shapes.
Read more about this topic: Microelectromechanical Systems
Famous quotes containing the word materials:
“In daily life what distinguishes the master is the using those materials he has, instead of looking about for what are more renowned, or what others have used well.”
—Ralph Waldo Emerson (1803–1882)