Materials For MEMS Manufacturing
The fabrication of MEMS evolved from the process technology in semiconductor device fabrication, i.e. the basic techniques are deposition of material layers, patterning by photolithography and etching to produce the required shapes.
Read more about this topic: Microelectromechanical Systems
Famous quotes containing the words materials for and/or materials:
“Though the hen should sit all day, she could lay only one egg, and, besides, would not have picked up materials for another.”
—Henry David Thoreau (18171862)
“The competent leader of men cares little for the niceties of other peoples characters: he cares mucheverythingfor the exterior uses to which they may be put.... These are men to be moved. How should he move them? He supplies the power; others simply the materials on which that power operates.”
—Woodrow Wilson (18561924)