Use
Lift-off process is used mostly to create metallic interconnections.
There are several types of lift-off processes, and what can be achieved depends highly on the actual process being used. Very fine structures have been used using EBL, for instance. The lift-off process can also involve multiple layers of different types of resist. This can for instance be used to create shapes that will prevent side walls of the resist being covered in the metal deposition stage.
Read more about this topic: Lift-off (microtechnology)
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