Timing Impact
As early as 2003, there was still optimism that EUVL would quickly be commercialized, as exemplified by the following quote: "Good progress has been made on all the technology fronts. Commercialization in 2009 remains the main goal for all the EUV community." However, as of 2012, EUVL still has not been commercialized.
The difficulties of EUV stem mainly from the difficulty of EUV light generation and the sensitivity of EUV light to surface contamination and roughness. The rise of multiple patterning, essentially a wavelength-independent technique, is also further jeopardizing its introduction.
Read more about this topic: Extreme Ultraviolet Lithography
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“A great man always considers the timing before he acts.”
—Chinese proverb.
“As in political revolutions, so in paradigm choice—there is no standard higher than the assent of the relevant community. To discover how scientific revolutions are effected, we shall therefore have to examine not only the impact of nature and of logic, but also the techniques of persuasive argumentation effective within the quite special groups that constitute the community of scientists.”
—Thomas S. Kuhn (b. 1922)