Timing Impact
As early as 2003, there was still optimism that EUVL would quickly be commercialized, as exemplified by the following quote: "Good progress has been made on all the technology fronts. Commercialization in 2009 remains the main goal for all the EUV community." However, as of 2012, EUVL still has not been commercialized.
The difficulties of EUV stem mainly from the difficulty of EUV light generation and the sensitivity of EUV light to surface contamination and roughness. The rise of multiple patterning, essentially a wavelength-independent technique, is also further jeopardizing its introduction.
Read more about this topic: Extreme Ultraviolet Lithography
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