Process
Focused electron beam of scanning electron microscope (SEM) or scanning transmission electron microscope (STEM) is commonly used. Focused ion beam can be applied instead, but then the process is called ion beam-induced deposition (IBID). The precursor material is gas, liquid or solid. Liquid or solids are gasified prior to deposition, usually through vaporization or sublimation, and introduced, at accurately controlled rate, into the high-vacuum chamber of electron microscope. Alternatively, solid precursor is sublimated by the electron beam itself.
When deposition occurs at high temperature or involves corrosive gases, specially designed deposition chamber is used; it is isolated from the microscope, and the beam is introduced into it through a micrometre-sized orifice. Small orifice size maintains differential pressure in the microscope (vacuum) and deposition chamber (no vacuum). Such deposition mode has been used for EBID of diamond.
The electron beam is scanned over desired shape resulting in deposition of material. The scanning is usually computer controlled. The deposition rate depends on the partial pressure and is of the order 10 nm/s.
Read more about this topic: Electron Beam-induced Deposition
Famous quotes containing the word process:
“A process in the weather of the world
Turns ghost to ghost; each mothered child
Sits in their double shade.
A process blows the moon into the sun,
Pulls down the shabby curtains of the skin;
And the heart gives up its dead.”
—Dylan Thomas (1914–1953)
“A man had better starve at once than lose his innocence in the process of getting his bread.”
—Henry David Thoreau (1817–1862)
“Opinions are formed in a process of open discussion and public debate, and where no opportunity for the forming of opinions exists, there may be moods—moods of the masses and moods of individuals, the latter no less fickle and unreliable than the former—but no opinion.”
—Hannah Arendt (1906–1975)