Instrumentation
Typically, a secondary ion mass spectrometer consists of:
- primary ion gun generating the primary ion beam
- primary ion column, accelerating and focusing the beam onto the sample (and in some devices an opportunity to separate the primary ion species by Wien filter or to pulse the beam)
- high vacuum sample chamber holding the sample and the secondary ion extraction lens
- mass analyser separating the ions according to their mass to charge ratio
- ion detection unit.
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