Processes
Several process are available using stencil lithography: material deposition and etching, as well as implantation of ions. Different stencil requirements are necessary for the various processes, e. g. an extra etch-resistant layer on the backside of the stencil for etching (if the membrane material is sensitive to the etching process) or a conductive layer on the backside of the stencil for ion implantation.
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