Organometallic Precursors
- Aluminium
- Trimethylaluminium (TMA or TMAl), Liquid
- Triethylaluminium (TEA or TEAl), Liquid
- Gallium
- Trimethylgallium (TMG or TMGa), Liquid
- Triethylgallium (TEG or TEGa), Liquid
- Indium
- Trimethylindium (TMI or TMIn), Solid
- Triethylindium (TEI or TEIn), Liquid
- Di-isopropylmethylindium (DIPMeIn), Liquid
- Ethyldimethylindium (EDMIn), Liquid
- Germanium
- Isobutylgermane (IBGe), Liquid
- Dimethylamino germanium trichloride (DiMAGeC), Liquid
- Tetramethylgermane (TMGe), Liquid
- Tetraethylgermanium(TEGe), Liquid
- Nitrogen
- Phenyl hydrazine, Liquid
- Dimethylhydrazine (DMHy), Liquid
- Tertiarybutylamine (TBAm), Liquid
- Ammonia NH3, Gas
- Phosphorus
- Phosphine PH3, Gas
- Tertiarybutyl phosphine (TBP), Liquid
- Bisphosphinoethane (BPE), Liquid
- Arsenic
- Arsine AsH3, Gas
- Tertiarybutyl arsine (TBAs), Liquid
- Monoethyl arsine (MEAs), Liquid
- Trimethyl arsine (TMAs), Liquid
- Antimony
- Trimethyl antimony (TMSb), Liquid
- Triethyl antimony (TESb), Liquid
- Tri-isopropyl antimony (TIPSb), Liquid
- Stibine SbH3, Gas
- Cadmium
- Dimethyl cadmium (DMCd), Liquid
- Diethyl cadmium (DECd), Liquid
- Methyl Allyl Cadmium (MACd), Liquid
- Tellurium
- Dimethyl telluride (DMTe), Liquid
- Diethyl telluride (DETe), Liquid
- Di-isopropyl telluride (DIPTe), Liquid
- Titanium
- Alkoxides, such as Titanium isopropoxide or Titanium ethoxide
- Selenium
- Dimethyl selenide (DMSe), Liquid
- Diethyl selenide (DESe), Liquid
- Di-isopropyl selenide (DIPSe), Liquid
- Zinc
- Dimethylzinc (DMZ), Liquid
- Diethylzinc (DEZ), Liquid
Read more about this topic: Metalorganic Vapour Phase Epitaxy