Mask Set

A mask set or a photomask set is a series of electronic data that define geometry for the photolithography steps of semiconductor fabrication. Each of the physical masks generated from this data is called a photomask.

A mask set for a modern process typically contains as many as twenty or more masks, each of which defines a specific photolithographic step in the semiconductor fabrication process. Examples of masks include:

  • p-well
  • n-well
  • active
  • poly
  • p-select
  • n-select
  • contact
  • metal1, 2, 3...

For more information, see photolithography and semiconductor manufacturing.

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