Excimer Lasers - Wavelength Determination

Wavelength Determination

The wavelength of an excimer laser depends on the molecules used, and is usually in the ultraviolet:

Excimer Wavelength Relative Power
mW
Ar2* 126 nm
Kr2* 146 nm
Xe2* 172 & 175 nm
ArF 193 nm 60
KrF 248 nm 100
XeBr 282 nm
XeCl 308 nm 50
XeF 351 nm 45
KrCl 222 nm 25

Excimer lasers, such as XeF and KrF, can also be made slightly tunable using a variety of prism and grating intracavity arrangements.

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