Electron Beam Lithography Systems
Electron beam lithography systems used in commercial applications are dedicated e-beam writing systems that are very expensive (>$4M USD). For research applications, it is very common to convert an electron microscope into an electron beam lithography system using a relatively low cost accessory ( Electron beam lithography systems can be classified according to both beam shape and beam deflection strategy. Older systems used Gaussian-shaped beams and scanned these beams in a raster fashion. Newer systems use shaped beams, which may be deflected to various positions in the writing field (this is also known as vector scan).
Read more about this topic: Electron Beam Lithography
Famous quotes containing the words beam and/or systems:
“What do we plant when we plant the tree?
We plant the ship that will cross the sea,
We plant the mast to carry the sails,
We plant the planks to withstand the gales—
The keel, the keelson, and beam and knee—
We plant the ship when we plant the tree.”
—Henry Abbey (1842–1911)
“Our little systems have their day;
They have their day and cease to be:
They are but broken lights of thee,
And thou, O Lord, art more than they.”
—Alfred Tennyson (1809–1892)