Doping (semiconductor) - Neutron Transmutation Doping

Neutron Transmutation Doping

Neutron transmutation doping (NTD) is an unusual doping method for special applications. Most commonly, it is used to dope silicon n-type in high-power electronics. It is based on the conversion of the Si-30 isotope into phosphorus atom by neutron absorption as follows:


^{30}\mathrm{Si} \, (n,\gamma) \, ^{31}\mathrm{Si} \rightarrow \, ^{31}\mathrm{P} + \beta^- \; (\mathrm{T}_{1/2} = 2.62 h).

In practice, the silicon is typically placed near a nuclear reactor to receive the neutrons. As neutrons continue to pass through the silicon, more and more phosphorus atoms are produced by transmutation, and therefore the doping becomes more and more strongly n-type. NTD is a far less common doping method than diffusion or ion implantation, but it has the advantage of creating an extremely uniform dopant distribution.

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