Computational lithography (also known as computational scaling) is the set of mathematical and algorithmic approaches designed to improve the resolution attainable through photolithography. Computational lithography has come to the forefront of photolithography in 2008 as the semiconductor industry grappled with the challenges associated with the transition to 22 nanometer CMOS process technology and beyond.
Read more about Computational Lithography: Context: Industry Forced To Extend 193nm Deep UV Photolithography, A Short History of Computational Lithography, Techniques Comprising Computational Lithography, A CPU-century Worth of Calculations or More