History
Alcatel Vacuum Technology, based in Annecy (France) has been involved in plasma processing for more than 25 years.
Its first equipment based on an Alcatel patented Inductive Coupled Plasma (ICP) source, with independent source power and substrate bias control for deep etching of silicon was launched in 1993. The exponential growth potential of the MEMS (Micro Electro Mechanical Systems) industry gave birth to the Micro Machining Systems business group (MMS) in 1994.
Alcatel Micro Machining Systems (AMMS) is now a business unit within Alcatel Vacuum Technology headquartered in Annecy, France. AMMS is a world-class supplier of deep plasma etching systems to manufacturers of MEMS (Micro Electro Mechanical Systems) and devices related to microelectronics and micropackaging applications.
In 2011 SPTS acquired Tegal DRIE assetts (formerly AMMS). The deal included the transfer to SPTS of the capital stock and operations of Tegal France SAS, a wholly owned Tegal subsidiary formed following the acquisition in September 2008 by Tegal of the DRIE assets of Alcatel Micro Machining Systems.
Read more about this topic: Alcatel Micro Machining Systems
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