90 Nanometer - Example: Elpida 90 Nm DDR2 SDRAM Process

Example: Elpida 90 Nm DDR2 SDRAM Process

  • Use of 300 mm wafer size
  • Use of KrF (248 nm) lithography with optical proximity correction
  • 512 Mbit
  • 1.8 V operation
  • Derivative of earlier 110 nm and 100 nm processes

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