Heterosilanes
An important, class of silicon compounds that is parallel to silanes, are the heterosilanes. The heterosilanes describes silanes, where one or more non-terminal silicon atoms are substituted with an atom of a different element. This gives rise to various subsets, such as siloxanes, silazanes, silathianes, and so forth. (Silyloxy)silane is the simplest example of a siloxane.
Read more about this topic: Silanes