Operation
The sample is illuminated by a focussed electron beam, and the beam is re-focussed on the detector, thus collecting only electrons passing through the focus. In order to produce an image, the beam should be laterally scanned. In the original design, this was achieved by placing synchronized scanning and descanning deflectors. Such design is complex and only a few custom-built setups exist. Another approach is to use stationary illumination and collection, but perform scan by moving the sample with a high-precision piezo-controlled holder. Such holders are readily available and can fit into most commercial electron microscopes thereby realizing the SCEM mode. As a practical demonstration, atomically resolved SCEM images have been recorded.
Read more about this topic: Scanning Confocal Electron Microscopy
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