History
The idea of SCEM logically follows from SCOM and thus is rather old. However, practical design and construction of scanning confocal electron microscope is a complex problem first solved by Nestor J. Zaluzec. His first scanning confocal electron microscope demonstrated the 3D properties of the SCEM, but have not realized the sub-nanometer lateral spatial resolution achievable with high-energy electrons (lateral resolution of only ~80 nm has been demonstrated). Several groups are currently working on construction of atomic resolution SCEM. In particular, atomically resolved SCEM images have already been obtained
Read more about this topic: Scanning Confocal Electron Microscopy
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