SCM Resolution
On the conducting surfaces, the resolution limit is estimated as 2 nm. For the high resolution, the quick analysis of capacitance of a capacitor with rough electrode is required. This SCM resolution is an order of magnitude better than that estimated for the atomic nanoscope; however, as other kinds of the probe microscopy, SCM requires careful preparation of the analyzed surface, which is supposed to be almost flat.
Read more about this topic: Scanning Capacitance Microscopy
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