Technical Aspects
There are many different arrangements to build a deposition chamber for PLD. The target material which is evaporated by the laser is normally found as a rotating disc attached to a support. However, it can also be sintered into a cylindrical rod with rotational motion and a translational up and down movement along its axis. This special configuration allows not only the utilization of a synchronized reactive gas pulse but also of a multicomponent target rod with which films of different multilayers can be created.
Some factors that influence the deposition rate:
- Target material
- Pulse energy of laser
- Distance from target to substrate
- Type of gas and pressure in chamber (oxygen, argon, etc.)
Read more about this topic: Pulsed Laser Deposition
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