Nanolithography is the branch of nanotechnology concerned with the study and application of fabricating nanometer-scale structures, meaning patterns with at least one lateral dimension between the size of an individual atom and approximately 100 nm. Nanolithography is used during the fabrication of leading-edge semiconductor integrated circuits (nanocircuitry) or nanoelectromechanical systems (NEMS).
As of 2007, nanolithography is a very active area of research in academia and in industry.
Read more about Nanolithography: Optical Lithography, Other Nanolithography Techniques, Bottom-up Methods