JVST B
Journal of Vacuum Science and Technology B specializes in vacuum processing and plasma processing of various materials, the structural characterization, microlithography, and the physics and chemistry of submicrometer and nanometer structures and devices.
Editor: Gary E. McGuire, International Technology Center.
Content of the Journal: http://scitation.aip.org/dbt/dbt.jsp?KEY=JVTBD9
Read more about this topic: Journal Of Vacuum Science And Technology