Basis
The first step in ion sculpting is to make either a through hole or a blind hole, most commonly using an focused ion beam (FIB). The holes are commonly ~100 nm, but can be made much smaller. This step may or may not be done at room temperature, with a low temperature of -120 C. Next, there are three common techniques to now 'sculpt' the hole: broad area ion exposure, TEM exposure, and FIB exposure. Holes can be closed completely, but also they can be left open at a lower limit of 1 - 10 nm.
Read more about this topic: Ion-beam Sculpting
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