Interferometry - Applications - Engineering and Applied Science

Engineering and Applied Science

• Newton (test plate) interferometry is frequently used in the optical industry for testing the quality of surfaces as they are being shaped and figured. Fig. 13 shows photos of reference flats being used to check two test flats at different stages of completion, showing the different patterns of interference fringes. The reference flats are resting with their bottom surfaces in contact with the test flats, and they are illuminated by a monochromatic light source. The light waves reflected from both surfaces interfere, resulting in a pattern of bright and dark bands. The surface in the left photo is nearly flat, indicated by a pattern of straight parallel interference fringes at equal intervals. The surface in the right photo is uneven, resulting in a pattern of curved fringes. Each pair of adjacent fringes represents a difference in surface elevation of half a wavelength of the light used, so differences in elevation can be measured by counting the fringes. The flatness of the surfaces can be measured to millionths of an inch by this method. To determine whether the surface being tested is concave or convex with respect to the reference optical flat, any of several procedures may be adopted. One can observe how the fringes are displaced when one presses gently on the top flat. If one observes the fringes in white light, the sequence of colors becomes familiar with experience and aids in interpretation. Finally one may compare the appearance of the fringes as one moves ones head from a normal to an oblique viewing position. These sorts of maneuvers, while common in the optical shop, are not suitable in a formal testing environment. When the flats are ready for sale, they will typically be mounted in a Fizeau interferometer for formal testing and certification.
• Fabry-Perot etalons are widely used in telecommunications, lasers and spectroscopy to control and measure the wavelengths of light. Dichroic filters are multiple layer thin-film etalons. In telecommunications, wavelength-division multiplexing, the technology that enables the use of multiple wavelengths of light through a single optical fiber, depends on filtering devices that are thin-film etalons. Single-mode lasers employ etalons to suppress all optical cavity modes except the single one of interest.

• The Twyman–Green interferometer, invented by Twyman and Green in 1916, is a variant of the Michelson interferometer widely used to test optical components. The basic characteristics distinguishing it from the Michelson configuration are the use of a monochromatic point light source and a collimator. It is interesting to note that Michelson (1918) criticized the Twyman-Green configuration as being unsuitable for the testing of large optical components, since the light sources available at the time had limited coherence length. Michelson pointed out that constraints on geometry forced by limited coherence length required the use of a reference mirror of equal size to the test mirror, making the Twyman-Green impractical for many purposes. Decades later, the advent of laser light sources answered Michelson's objections. (A Twyman-Green interferometer using a laser light source and unequal path length is known as a Laser Unequal Path Interferometer, or LUPI.) Fig. 14 illustrates a Twyman-Green interferometer set up to test a lens. Light from a monochromatic point source is expanded by a diverging lens (not shown), then is collimated into a parallel beam. A convex spherical mirror is positioned so that its center of curvature coincides with the focus of the lens being tested. The emergent beam is recorded by an imaging system for analysis.
• Mach-Zehnder interferometers are being used in integrated optical circuits, in which light interferes between two branches of a waveguide that are externally modulated to vary their relative phase. A slight tilt of one of the beam splitters will result in a path difference and a change in the interference pattern. Mach-Zehnder interferometers are the basis of a wide variety of devices, from RF modulators to sensors to optical switches.
• The latest proposed extremely large astronomical telescopes, such as the Thirty Meter Telescope and the European Extremely Large Telescope, will be of segmented design. Their primary mirrors will be built from hundreds of hexagonal mirror segments. Polishing and figuring these highly aspheric and non-rotationally symmetric mirror segments presents a major challenge. Traditional means of optical testing compares a surface against a spherical reference with the aid of a null corrector. In recent years, computer-generated holograms (CGHs) have begun to supplement null correctors in test setups for complex aspheric surfaces. Fig. 15 illustrates how this is done. Unlike the figure, actual CGHs have line spacing on the order of 1 to 10 microns. When laser light is passed through the CGH, the zero-order diffracted beam experiences no wavefront modification. The wavefront of the first-order diffracted beam, however, is modified to match the desired shape of the test surface. In the illustrated Fizeau interferometer test setup, the zero-order diffracted beam is directed towards the spherical reference surface, and the first-order diffracted beam is directed towards the test surface in such a way that the two reflected beams combine to form interference fringes. The same test setup can be used for the innermost mirrors as for the outermost, with only the CGH needing to be exchanged.

• Ring laser gyroscopes (RLGs) and fibre optic gyroscopes (FOGs) are interferometers used in navigation systems. They operate on the principle of the Sagnac effect. The distinction between RLGs and FOGs is that in a RLG, the entire ring is part of the laser while in a FOG, an external laser injects counter-propagating beams into an optical fiber ring, and rotation of the system then causes a relative phase shift between those beams. In a RLG, the observed phase shift is proportional to the accumulated rotation, while in a FOG, the observed phase shift is proportional to the angular velocity.
• In telecommunication networks, heterodyning is used to move frequencies of individual signals to different channels which may share a single physical transmission line. This is called frequency division multiplexing (FDM). For example, a coaxial cable used by a cable television system can carry 500 television channels at the same time because each one is given a different frequency, so they don't interfere with one another. Continuous wave (CW) doppler radar detectors are basically heterodyne detection devices that compare transmitted and reflected beams.

Optical heterodyne detection is used for coherent Doppler LIDAR measurements capable of detecting very weak light scattered in the atmosphere and monitoring wind speeds with high accuracy. It has application in optical fiber communications, in various high resolution spectroscopic techniques, and the self-heterodyne method can be used to measure the linewidth of a laser.

Optical heterodyne detection is an essential technique used in high-accuracy measurements of the frequencies of optical sources, as well as in the stabilization of their frequencies. Until a relatively few years ago, lengthy frequency chains were needed to connect the microwave frequency of a cesium or other atomic time source to optical frequencies. At each step of the chain, a frequency multiplier would be used to produce a harmonic of the frequency of that step, which would be compared by heterodyne detection with the next step (the output of a microwave source, far infrared laser, infrared laser, or visible laser). Each measurement of a single spectral line required several years of effort in the construction of a custom frequency chain. Currently, optical frequency combs have provided a much simpler method of measuring optical frequencies. If a mode-locked laser is modulated to form a train of pulses, its spectrum is seen to consist of the carrier frequency surrounded by a closely spaced comb of optical sideband frequencies with a spacing equal to the pulse repetition frequency (Fig. 16). The pulse repetition frequency is locked to that of the frequency standard, and the frequencies of the comb elements at the red end of the spectrum are doubled and heterodyned with the frequencies of the comb elements at the blue end of the spectrum, thus allowing the comb to serve as its own reference. In this manner, locking of the frequency comb output to an atomic standard can be performed in a single step. To measure an unknown frequency, the frequency comb output is dispersed into a spectrum. The unknown frequency is overlapped with the appropriate spectral segment of the comb and the frequency of the resultant heterodyne beats is measured.

• One of the most common industrial applications of optical interferometry is as a versatile measurement tool for the high precision examination of surface topography. Popular interferometric measurement techniques include Phase Shifting Interferometry (PSI), Vertical Scanning Interferometry(VSI), and Enhanced VSI (EVSI). These techniques are widely used in micro-electronic and micro-optic fabrication. PSI uses monochromatic light and provides very precise measurements; however it is only usable for surfaces that are very smooth. VSI uses white light and, rather than looking at the shape of the fringes, as does PSI, looks for best focus position; it provides less precise measurements than PSI but can be used on rough surfaces. Different configurations of VSI may be used to measure macroscopic objects with surface profiles measuring in the centimeter range, to microscopic objects with surface profiles measuring in the micrometer range. EVSI represents a hybrid technique, using white light and measuring phase shifting.

• Phase Shifting Interferometry addresses several issues associated with the classical analysis of static interferograms. Classically, one measures the positions of the fringe centers. As seen in Fig. 13, fringe deviations from straightness and equal spacing provide a measure of the aberration. Errors in determining the location of the fringe centers provide the inherent limit to precision of the classical analysis, and any intensity variations across the interferogram will also introduce error. There is a trade-off between precision and number of data points: closely spaced fringes provide many data points of low precision, while widely spaced fringes provide a low number of high precision data points. Since fringe center data is all that one uses in the classical analysis, all of the other information that might theoretically be obtained by detailed analysis of the intensity variations in an interferogram is thrown away. Finally, with static interferograms, additional information is needed to determine the polarity of the wavefront: In Fig. 13, one can see that the tested surface on the right deviates from flatness, but one cannot tell from this single image whether this deviation from flatness is concave or convex. Traditionally, this information would be obtained using non-automated means, such as by observing the direction that the fringes move when the reference surface is pushed.

Phase shifting interferometry overcomes these limitations by not relying on finding fringe centers, but rather by collecting intensity data from every point of the CCD image sensor. As seen in Fig. 17, multiple interferograms (at least three) are analyzed with the reference optical surface shifted by a precise fraction of a wavelength between each exposure using a piezoelectric transducer (PZT). Alternatively, precise phase shifts can be introduced by modulating the laser frequency. The captured images are processed by a computer to calculate the optical wavefront errors. The precision and reproducibility of PSI is far greater than possible in static interferogram analysis, with measurement repeatabilities of a hundredth of a wavelength being routine. Phase shifting technology has been adapted to a variety of interferometer types such as Twyman-Green, Mach–Zehnder, laser Fizeau, and even common path configurations such as point diffraction and lateral shearing interferometers. More generally, phase shifting techniques can be adapted to almost any system that uses fringes for measurement, such as holographic and speckle interferometry.

• Vertical Scanning Interferometry (Scanning White Light Interferometry) is an example of low-coherence interferometry, which exploits the low coherence of white light. Interference will only be achieved when the path length delays of the interferometer are matched within the coherence time of the light source. VSI monitors the fringe contrast rather than the shape of the fringes.

Fig. 17 illustrates a VSI microscope using a Mirau interferometer in the objective; other forms of interferometer used with white light include the Michelson interferometer (for low magnification objectives, where the reference mirror in a Mirau objective would interrupt too much of the aperture) and the Linnik interferometer (for high magnification objectives with limited working distance). The sample (or alternatively, the objective) is moved vertically over the full height range of the sample, and the position of maximum fringe contrast is found for each pixel. The chief benefit of low-coherence interferometry is that systems can be designed that do not suffer from the 2 pi ambiguity of coherent interferometry, and as seen in Fig. 18, which scans a 180μm x 140μm x 10μm volume, it is well suited to profiling steps and rough surfaces. The axial resolution of the system is determined by the coherence length of the light source and is typically in the micrometer range. Industrial applications include in-process surface metrology, roughness measurement, 3D surface metrology in hard-to-reach spaces and in hostile environments, profilometry of surfaces with high aspect ratio features (grooves, channels, holes), and film thickness measurement (semi-conductor and optical industries, etc.).

Fig. 19 illustrates a Twyman–Green interferometer set up for white light scanning of a macroscopic object.

• Holographic interferometry is a technique which uses holography to monitor small deformations in single wavelength implementations. In multi-wavelength implementations, it is used to perform dimensional metrology of large parts and assemblies and to detect larger surface defects.

Holographic interometry was discovered by accident as a result of mistakes committed during the making of holograms. Early lasers were relatively weak and photographic plates were insensitive, necessitating long exposures during which vibrations or minute shifts might occur in the optical system. The resultant holograms, which showed the holographic subject covered with fringes, were considered ruined.

Eventually, several independent groups of experimenters in the mid-60's realized that the fringes encoded important information about dimensional changes occurring in the subject, and began intentionally producing holographic double exposures. The main Holographic interferometry article covers the disputes over priority of discovery that occurred during the issuance of the patent for this method.

Double- and multi- exposure holography is one of three methods used to create holographic interferograms. A first exposure records the object in an unstressed state. Subsequent exposures on the same photographic plate are made while the object is subjected to some stress. The composite image depicts the difference between the stressed and unstressed states.

Real-time holography is a second method of creating holographic interferograms. A holograph of the unstressed object is created. This holograph is illuminated with a reference beam to generate a hologram image of the object directly superimposed over the original object itself while the object is being subjected to some stress. The object waves from this hologram image will interfere with new waves coming from the object. This technique allows real time monitoring of shape changes.

The third method, time-average holography, involves creating a holograph while the object is subjected to a periodic stress or vibration. This yields a visual image of the vibration pattern.

Figure 20. InSAR Image of Kilauea, Hawaii monitoring ground deformation

Figure 21. ESPI fringes showing a vibration mode of a clamped square plate

• Interferometric synthetic aperture radar (InSAR) is a radar technique technique used in geodesy and remote sensing. Satellite synthetic aperture radar images of a geographic feature are taken on separate days, and changes that have taken place between radar images taken on the separate days are recorded as fringes similar to those obtained in holographic interferometry. The technique can monitor centimeter-scale deformations resulting from earthquakes, volcanoes and landslides, and also has uses in structural engineering, in particular for the monitoring of subsidence and structural stability. Fig 20 shows Kilauea, an active volcano in Hawaii. Data acquired using the space shuttle Endeavour's X-band Synthetic Aperture Radar on April 13, 1994 and October 4, 1994 were used to generate interferometric fringes, which were overlaid on the X-SAR image of Kilauea.
• Electronic speckle pattern interferometry (ESPI), also known as TV holography, uses video detection and recording to produce an image of the object upon which is superimposed a fringe pattern which represents the displacement of the object between recordings. (see Fig. 21) The fringes are similar to those obtained in holographic interferometry.

When lasers were first invented, laser speckle was considered to be a severe drawback in using lasers to illuminate objects, particularly in holographic imaging because of the grainy image produced. It was later realized that speckle patterns could carry information about the object's surface deformations. Butters and Leendertz developed the technique of speckle pattern interferometry in 1970, and since then, speckle has been exploited in a variety of other applications. A photograph is made of the speckle pattern before deformation, and a second photograph is made of the speckle pattern after deformation. Digital subtraction of the two images results in a correlation fringe pattern, where the fringes represent lines of equal deformation. Short laser pulses in the nanosecond range can be used to capture very fast transient events. A phase problem exists: In the absence of other information, one cannot tell the difference between contour lines indicating a peak versus contour lines indicating a trough. To resolve the issue of phase ambiguity, ESPI may be combined with phase shifting methods.

• A method of establishing precise geodetic baselines, invented by Yrjö Väisälä, exploited the low coherence length of white light. Initially, white light was split in two, with the reference beam "folded", bouncing back-and-forth six times between a mirror pair spaced precisely 1 m apart. Only if the test path was precisely 6 times the reference path would fringes be seen. Repeated applications of this procedure allowed precise measurement of distances up to 864 meters. Baselines thus established were used to calibrate geodetic distance measurement equipment, leading to a metrologically traceable scale for geodetic networks measured by these instruments. (This method has been superseded by GPS.)
• Other uses of interferometers have been to study dispersion of materials, measurement of complex indices of refraction, and thermal properties. They are also used for three-dimensional motion mapping including mapping vibrational patterns of structures.