Industrial Applications
In industry, GCIB has been used for the manufacture of semiconductor devices, optical thin films, trimming SAW and FBAR filter devices, fixed disk memory systems and for other uses. GCIB smoothing of high voltage electrodes has been shown to reduce field electron emission, and GCIB treated RF cavities are being studied for use in future high energy particle accelerators. A related technique, with a limited range of applications, using of high-velocity carbon Fullerenes to treat surfaces, has been studied.
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