Focused Ion Beam - History

History

History of FIB technology

  • 1975: The first FIB systems based on field emission technology were developed by Levi-Setti and by Orloff and Swanson and used gas field ionization sources (GFISs).
  • 1978: The first FIB based on an LMIS was built by Seliger et al.

Physics of LMIS

  • 1600: Gilbert documented that fluid under high tension forms a cone.
  • 1914: Zeleny observed and filmed cones and jets
  • 1959: Feynman suggested the use of ion beams.
  • 1964: Taylor produced exactly conical solution to equations of electro hydrodynamics (EHD)
  • 1975: Krohn and Ringo produced first high brightness ion source: LMIS

Some pioneers of LMIS & FIB

  • Mahoney (1969)
  • Sudraud et al. Paris XI Orsay (1974)
  • University of Oxford Mair (1980)
  • Culham UK, Roy Clampitt Prewett (1980)
  • Oregon Graduate Center L.Swanson (1980)
  • Oregon Graduate Center J. Orloff (1974)
  • MIT, J. Melngailis (1980)

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