History
History of FIB technology
- 1975: The first FIB systems based on field emission technology were developed by Levi-Setti and by Orloff and Swanson and used gas field ionization sources (GFISs).
- 1978: The first FIB based on an LMIS was built by Seliger et al.
Physics of LMIS
- 1600: Gilbert documented that fluid under high tension forms a cone.
- 1914: Zeleny observed and filmed cones and jets
- 1959: Feynman suggested the use of ion beams.
- 1964: Taylor produced exactly conical solution to equations of electro hydrodynamics (EHD)
- 1975: Krohn and Ringo produced first high brightness ion source: LMIS
Some pioneers of LMIS & FIB
- Mahoney (1969)
- Sudraud et al. Paris XI Orsay (1974)
- University of Oxford Mair (1980)
- Culham UK, Roy Clampitt Prewett (1980)
- Oregon Graduate Center L.Swanson (1980)
- Oregon Graduate Center J. Orloff (1974)
- MIT, J. Melngailis (1980)
Read more about this topic: Focused Ion Beam
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