Unexpected Resolution Limits
Given that EUV is a significant reduction in wavelength compared to current lithography wavelengths, one would expect significantly better resolution. However, the resolution is ultimately determined by the interaction volume in the image recording medium, i.e., the photoresist. As noted above, the low energy electrons released by EUV could blur the original EUV image. In addition, there are statistical effects, especially for feature areas less than 1500 square nanometers.
Read more about this topic: Extreme Ultraviolet Lithography
Famous quotes containing the words unexpected, resolution and/or limits:
“Later
Some movement is reversed and the urgent masks
Speed toward a totally unexpected end
Like clocks out of control.”
—John Ashbery (b. 1927)
“The passions do very often give birth to others of a nature most contrary to their own. Thus avarice sometimes brings forth prodigality, and prodigality avarice; a mans resolution is very often the effect of levity, and his boldness that of cowardice and fear.”
—François, Duc De La Rochefoucauld (16131680)
“I fear chiefly lest my expression may not be extra-vagant enough, may not wander far enough beyond the narrow limits of my daily experience, so as to be adequate to the truth of which I have been convinced.”
—Henry David Thoreau (18171862)