History
The excimer laser was invented in 1970 by Nikolai Basov, V. A. Danilychev and Yu. M. Popov, at the Lebedev Physical Institute in Moscow, using a xenon dimer (Xe2) excited by an electron beam to give stimulated emission at 172 nm wavelength. A later improvement, developed by many groups in 1975 was the use of noble gas halides (originally XeBr). These groups include the Avco Everett Research Laboratory, Sandia Laboratories, the Northrop Research and Technology Center, and the United States Government's Naval Research Laboratory who also developed a XeCl Laser that was excited using a microwave discharge.
Read more about this topic: Excimer Lasers
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