Spatial Resolution
Primary STEM electrons can be focused into spots as small as ~0.045 nm. However, the smallest structures deposited so far by EBID are dots of ~0.7 nm diameter. The reason for reduced resolution is wide angular range of secondary electrons, and there is no straightforward way to overcome this problem.
Read more about this topic: Electron Beam-induced Deposition
Famous quotes containing the word resolution:
“It is a part of the American character to consider nothing as desperate; to surmount every difficulty by resolution and contrivance.”
—Thomas Jefferson (1743–1826)