Spatial Resolution
Primary STEM electrons can be focused into spots as small as ~0.045 nm. However, the smallest structures deposited so far by EBID are dots of ~0.7 nm diameter. The reason for reduced resolution is wide angular range of secondary electrons, and there is no straightforward way to overcome this problem.
Read more about this topic: Electron Beam-induced Deposition
Famous quotes containing the word resolution:
“Breaking his oath and resolution like
A twist of rotten silk.”
—William Shakespeare (1564–1616)