Spatial Resolution
Primary STEM electrons can be focused into spots as small as ~0.045 nm. However, the smallest structures deposited so far by EBID are dots of ~0.7 nm diameter. The reason for reduced resolution is wide angular range of secondary electrons, and there is no straightforward way to overcome this problem.
Read more about this topic: Electron Beam-induced Deposition
Famous quotes containing the word resolution:
“A resolution to avoid an evil is seldom framed till the evil is so far advanced as to make avoidance impossible.”
—Thomas Hardy (18401928)