Spatial Resolution
Primary STEM electrons can be focused into spots as small as ~0.045 nm. However, the smallest structures deposited so far by EBID are dots of ~0.7 nm diameter. The reason for reduced resolution is wide angular range of secondary electrons, and there is no straightforward way to overcome this problem.
Read more about this topic: Electron Beam-induced Deposition
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—François, Duc De La Rochefoucauld (1613–1680)