Deposition Mechanism
SEM or STEM electrons have energy too high (typically between 10 and 300 keV) to efficiently break molecular bonds. Therefore decomposition occurs via a two-step process: any materials (substrate, holders or the material that has already been deposited) near the deposition spot absorb primary electrons and re-emit secondary electrons having a wide spectrum of energies (of the order 1 keV) and angles. Secondary electrons decompose the precursor molecules.
Read more about this topic: Electron Beam-induced Deposition
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