Electron Backscatter Diffraction - Integrated EBSD/EDS Mapping

Integrated EBSD/EDS Mapping

When simultaneous EDS/EBSD collection can be achieved, the capabilities of both techniques can be enhanced. There are applications where sample chemistry or phase cannot be differentiated via EDS alone because of similar composition; and structure cannot be solved with EBSD alone because of ambiguous structure solutions. To accomplish integrated mapping, analysis area is scanned and at each point Hough peaks and EDS region-of-interest counts are stored. Positions of phases are determined in X-ray maps and measured EDS intensities are given in charts for each element. For each phase the chemical intensity ranges are set to select the grains. All patterns are then re-indexed off-line. The recorded chemistry determines which phase / crystal structure file is used for indexing of each point. Each pattern is indexed by only one phase and maps displaying clearly distinguished phases are generated.

EBSD when used together with other in-SEM techniques such as cathodoluminescence (CL), wavelength dispersive X-ray spectroscopy (WDS) and/or energy dispersive X-ray spectroscopy (EDS) can provide a deeper insight into the specimen's properties. For example, the minerals calcite (limestone) and aragonite (shell) have the same chemical composition – calcium carbonate (CaCO₃) therefore EDS/WDS cannot tell them apart, but they have different microcrystalline structures so EBSD can differentiate between them.