Compound Semiconductors - Fabrication

Fabrication

Metalorganic vapour phase epitaxy (MOVPE) is the most popular deposition technology for the formation of compound semiconducting thin films for devices. It uses ultrapure metalorganics and / or hydrides as precursor source materials in an ambient gas such as hydrogen.

Other techniques of choice include:

  • Molecular beam epitaxy (MBE)
  • Hydride vapour phase epitaxy (HVPE)
  • Liquid phase epitaxy (LPE)
  • Metal-organic molecular beam epitaxy (MOMBE)
  • Atomic layer deposition (ALD)

Read more about this topic:  Compound Semiconductors

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