College of Nanoscale Science and Engineering - Campus

Campus

CNSE's Albany NanoTech Complex is located at the western end of the University at Albany campus in Albany, New York. NanoFab 200 (CESTM), an earlier part of the campus, was completed June 1997. This 70,000-square-foot (6,500 m2), $16.5 million facility includes 4,000 square feet (370 m2) feet of cleanroom space, plus CNSE metrology labs and office space for programs such as SUNY’s Atmospheric Sciences Research Center. NanoFab South (NFS), completed March 2004, is a 150,000-square-foot (14,000 m2), $50 million facility including 32,000 square feet (3,000 m2) of 300 mm wafer, class 1-capable cleanroom space. Completed December 2005, NanoFab North (NFN) is a 230,000-square-foot (21,000 m2), $175 million facility including 35,000 square feet (3,300 m2) of cleanroom space with Class 1-capable 300mm wafer production. The most recent expansion of the Albany NanoTech Complex was completed in March 2009. The $150 million project includes NanoFab East, a 250,000-square-foot (23,000 m2) office, laboratory, and classroom building, in addition to NanoFab Central, a separate 100,000-square-foot (9,300 m2) building that houses 15,000 square feet (1,400 m2) of 300mm wafer, class 1 -capable cleanroom space. The NanoFab North facility also houses a $65 million tool that uses extreme ultraviolet light to produce the world's smallest integrated circuits, and is one of only two in the world. The newest addition to the CNSE campus is NanoFab Xtension, due to host the Global 450mm Consortium as well as additional Class 1 capable cleanroom space upon its completion.